Facilities > RF Test & Applications

HIGH PRECISION CV-IV MEASUREMENT SYSTEM

Type

- Hardware

Description

The CV-IV measurement system provides full capability of semiconductor characterization from high voltage to low voltage range with high precision. The system is integrated with Interactive Characterization Software (ICS) that have full control of the measurement setup and data acquisition for various types of semiconductor device.

System Features

The system consists of DC Parametric Analyzer (4200-SCS), programmable DC Source Measure Unit (Keithley 236), Capacitance Meter (Keithley 590), Quasi-static Meter (Keithley 595) and high frequency probe station for on-wafer measurement. The probe station is shielded with black box to increase grounding connection and to avoid outside visible light for photo-sensor measurement.

System Capability

Up to four (4) DC points for signal and one (1) point for grounding. (Suitable for transistor, diode and passive component measurement) Low and High I-V measurement up 200 V with current range from 1 fA to 1.0A. Capacitance-voltage measurement at 100KHz and 1MHz frequency Quasi-static measurement High Accuracy DC biasing for active device measurement

Sample Information

Sample : Chip, Wafer, Die Size: 0.5cm (min) to 15cm (max) DC Probe tip size (on-wafer): 0.5um, 2um, 4um.

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